Home
Academic & Professional Literature
Technological Sciences
Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies

Voted 0

ISBN: 9780128177860
Published: 2020
Publisher: Elsevier
Language: English
Format: Paperback / softback
Format: 9.25×7.5

Description

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students.

Reviews (0)

Write a review

Rate this item

Your name

Your e-mail

Your review

Comment

Selection

Description

Functionality (necessary) cookies

These cookies are essential to the functioning of the website and they cannot be disabled. They do not store any personally identifiable information and are deleted once you leave the website.

Performance Cookies

These cookies are used to measure the use of the website and traffic sources in order to gain information required to improve the functioning of the website. These cookies help us to determine which pages are the most popular and to learn about the users’ browsing habits. To this end we use the Google Analytics statistical engine. We do not disclose any information we have collected. All information gathered is completely anonymous and cannot identify you personally.

Marketing cookies

These third-party cookies are used to display ads personalized to your needs. We use cookies that help us to collect information on your web surfing behaviour and allow us to learn about your interests so that we could display only those ads that are relevant to you. Leave this box unchecked if you do not want us to show you any advertising.