Wei Gao

Surface Metrology for Micro- and Nanofabrication

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ISBN: 9780128178508
Author : Wei Gao
Published: 2020
Publisher: Elsevier
Language: English
Format: Paperback / softback
Format: 9.25×7.5

Description

<i>Surface Metrology for Micro- and Nanofabrication</i> presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.

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