- Titulinis
- Dalykinė ir mokslinė literatūra
- Technologijos mokslai
- Kitos technologijų mokslų knygos
- Handbook of Silicon Based MEMS Materials and Technologies
Handbook of Silicon Based MEMS Materials and Technologies
ISBN: 9780128177860
Leidimo metai: 2020
Leidėjas: Elsevier
Leidinio kalba: Anglų
Formatas: Minkšti viršeliai
Formatas: 9.25×7.5
Leidimo metai: 2020
Leidėjas: Elsevier
Leidinio kalba: Anglų
Formatas: Minkšti viršeliai
Formatas: 9.25×7.5
Aprašymas
<p><i>Handbook of Silicon Based MEMS Materials and Technologies, Third Edition</i> is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS.<b> </b>The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures.</p> <p>The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. </p>
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