Surface Metrology for Micro- and Nanofabrication - Humanitas
Wei Gao

Surface Metrology for Micro- and Nanofabrication

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ISBN: 9780128178508
Autorius : Wei Gao
Leidimo metai: 2020
Leidėjas: Elsevier
Leidinio kalba: Anglų
Formatas: Minkšti viršeliai
Formatas: 9.25×7.5
Aprašymas
<i>Surface Metrology for Micro- and Nanofabrication</i> presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.

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